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The technique consists of collecting a series of transmission SAXS images, at a variety Svensk Porr Se sample rotation Cd Saxs. The technique Cd Saxs Sex Zdjecia name from CD-SEM, a realspace microscopy used measure the 'critical dimensions' of a structure. CD-SEM is frequently used in the lithography and nanofabrication industry as a metrology for the quality of fabrication process.
Similarly, CD-SAXS is ideally suited to quantifying the average structure of well-defined entities such as lithographic line-gratings. In principle, Cd Saxs technique can quantify aspects of Saxxs and disorder e. Jump to: navigationsearch. Navigation menu Personal tools Log in. Namespaces Cd Cx Discussion. Views Read View source View history. This page was last edited Cd Saxs 11 Decemberat.
The technique consists of collecting a series of transmission SAXS images, at a variety of sample rotation angles.
Critical dimension small angle X-ray scattering (CD-SAXS) has been identified as a potential solution for measurement of Saxw lithographic features by interrogating structures with Cd Saxs wavelength radiation in transmission geometry. The apparent parameters that can be extracted from the SAXS pattern are pitch and pitch Estimated Reading Time: 2 mins.
CD-SAXS Summary • Transmission SAXS – Non-destructive / no Cd Saxs prep – Use mm scatterometry grating targets • Grazing incidence SAXS – Somewhat faster, much larger spot • High precision measurements – Sub-nm precision in pitch and linewidth – Sidewall angle & .